https://www.selleckchem.com/pr....oducts/pkc-theta-inh
To evaluate the characteristics of Pb(Zr,Ti)O3 thin films (about 10 lm thick) with three different sputtering configurations-single-layer deposition (SL), multilayer deposition with internal electrodes (ML), and multistep deposition (MS)-were prepared. The SL films exhibited poorer dielectric characteristics than the ML and MS films. The reliability and piezoelectric characteristics were especially high in the MS film, with an e31,f constant of.9.5 C m.2. To investigate the porosity of the films, reconstructed 3-dimensional
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