https://www.selleckchem.com/pr....oducts/slf1081851-hy
Defects occur as self-assembled monolayers form, and the number and type of defects depend on the surface preparation and deposition solvent, among other parameters. Indirect measures to detect defects using a layer property, such as the thickness or bond vibrational frequency, are used routinely for process development but often lack sensitivity. Direct measures using an atomic probe offer a glimpse of defect structures but over a small fraction of the layer. Direct detection after reacting defects by etching or deposi
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