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We verified the DSS method using a 152 mm diameter optical flat mirror and determined the root-mean-square (rms) measurement error to be only 0.2 nm, which was comparable to the error of the full-aperture interferometric measurement. In addition, we tested a 1.2 m diameter flat mirror with a reference sphere with an aperture of 0.8 m and measured its SFE to be 11.9±0.5nm rms.In this paper, by considering wave phase analysis, the density of modes, group velocity, and lateral shift in one-dimensional multilayer are theoretically computed
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