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Terahertz (THz) solid immersion microscopy is a novel promising THz imaging modality that overcomes the Abbe diffraction limit. In our prior work, an original reflection-mode THz solid immersion microscope system with the resolution of 0.15λ (in free space) was demonstrated and used for imaging of soft biological tissues. In this paper, a numerical analysis, using the finite-difference time-domain technique, and an experimental study, using a set of objects with distinct refractive indexes, were performed in order to uncover, for the firs