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The guide beam may then be employed to compensate for various error resources, such as for example laser ray dithering or changes of the measurement setup as a result of the thermal growth of this components. The potency of this setup is proven by substantial simulations and dimensions. The compensation setup improves the deviation in fixed measurements by around 75%, whereas the dimension anxiety far away of 1 m can be reduced to 85 μm. Consequently, this payment setup can
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